Tomography

Computed tomography (CT)

3D imaging of semiconductor components by discrete laminography

K. J. Batenburg, W J. Palenstijn, and J. Sijbers, "3D imaging of semiconductor components by discrete laminography", Stress induced phenomena and reliability in 3D microelectronics: AIP Conference Proceedings, vol. 1601, pp. 168-179, 2014.

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